The design procedure of microsystems is composed of mainly two parts: 1. Process design and 2. Device design. This is one of the microsystem design courses series and will be focused on the process part. The course objectives are:
- To gain an understanding of standard microfabrication techniques and the issues surrounding them.
- To understand the unique requirements, environments, and applications of micromanufacturing.
- To apply knowledge of microfabrication techniques and applications to the design and manufacturing of microsystems.
- To be familiar with layout design CAD tools for microsystem fabrication