Equipment on campus
Plasma etcher (RIE)
이디디 E5
ICP RIE System
(주)엘에이티
Surface Profiler (Stylus Scanner)
Kla-tencorP-17
Plasma Process System
펨토사이언스 COVANCE-MP
Parylene Coating System
펨토사이언스 LAVIDA
Mask Aligner
Suss Microtec MA 6
Manual Spin Coater
Tft
Scanning Electron Microscope
JEOL- FE-SEM( IT-500HR)
Scanning Electron Microscope2
JEOL- 7610F-Plus
Scanning Electron Microscope
JEOL-7800F
R.F전용 Magnetron Sputter
한국진공 KVS-T8860
D.C/R.F Magnetron Sputter2
한국진공
D.C/R.F Magnetron Sputter
한국진공